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  • SUSS MicroTec Receives Cluster Tool Order
Feb 2002
MUNICH, Germany, Feb. 25 -- SUSS MicroTec said it has received its first lithography cluster order from a major optoelectronic semiconductor manufacturer.

The lithography cluster is used in volume production of components for a variety of compound semiconductor applications, including monolithic microwaves ICs, semiconductor lasers, LEDs and infrared sensors.

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