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  • Indigo-DUV Wins Circle of Excellence Award
May 2002
LOS GATOS, Calif., Feb. 5 -- Positive Light's Indigo-DUV laser was awarded the 2002 Photonics Spectra Circle of Excellence Award at Photonics West 2003 last week.

The company said the product is the first all-solid-state, narrow linewidth 193 nm laser source for optical metrology and calibration of 193 nm lithography stepper lenses and deep-UV spectrometers.

The Photonics Circle of Excellence Awards recognize the top 25 technically innovative products in photonics markets.

The Indigo-DUV produces more than 2 mW of single-frequency radiation in a TEM00 spatial mode. The design includes a Ti:sapphire oscillator pumped by the DPSS Nd:YLF Evolution laser and a fourth harmonic frequency conversion package. The injection seeded Ti:sapphire oscillator produces near transform-limited linewidths for 40 ns, 772 nm output. A kilohertz closed-loop control circuit provides the frequency stability, and a high-precision wavelength option controls the long-term frequency drift to subpicometer performance, Positive Light said.

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