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ISMT Picks Coherent to Develop Photomask Lasers

Photonics.com
Jun 2002
SANTA CLARA, Calif., June 20 -- Coherent Inc. has received a multiyear contract from International Sematech (ISMT) for lasers used in the development of advanced photomasks. The agreement is targeted toward laser systems at wavelengths below 200 nm, which will be required to fabricate advanced photomasks for the sub-70 nm technology nodes.

John Ambroseo, Coherent's COO and CEO-elect, said, "Coherent is pleased to enter into this agreement with ISMT, as part of our ongoing commitment to meeting the demands of the semiconductor capital equipment industry in both current and future generations of laser-based tools."

Kurt R. Kimmel, mask strategy program manager for ISMT, said, "Photomask cost and cycle time are acute issues for the advanced microelectronics manufacturers. The development of a critical laser light source will be an enabling component for multiple equipment applications in the production of advanced photomasks, from pattern generation to defect inspection and metrology."



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