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INTEGRATED MEMS

Photonics Spectra
Dec 2006
ArtecHouse.gifAn addition to the Microelectromechanical Systems series, the 221-page book Post-Processing Techniques for Integrated MEMS details how to merge the systems with their driving, control and signal processing electronics using pre-, interleaved or postprocessing. Chapters address such areas as maximum postprocessing temperature, silicon germanium as a suitable systems material and low thermal budget techniques for enhancing crystallization. Charts, diagrams, references, an index and a list of acronyms are included. Sherif Sedky; Artech House Inc., Norwood, Mass., 2006; $99.


GLOSSARY
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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