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  • Sematech and Schott Form Partnership

Photonics Spectra
Apr 2007
Sematech Inc. of Austin, Texas, has launched a joint agreement with Schott Lithotec AG of Jena, Germany, to develop mid-size, projection-quality lutetium aluminum garnet (LuAg) lens elements with an 80-mm diameter. The prototypes will establish the framework to test the feasibility of full-scale LuAG lenses, which must be ~150 mm in diameter to accommodate high-volume manufacturing. The goal is to produce a LuAG lens in 2009 to support beta exposure tools.

The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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