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  • Cymer to Ship Laser Light Source to ASML
Jul 2007
Cymer Inc., a San Diego supplier of excimer laser light sources used in semiconductor manufacturing, announced today it has reached an agreement to ship its new XLR 500i light source to lithography system provider ASML in the current quarter. The XLR 500i will be gradually incorporated into ASML's argon fluoride (ArF) light source, starting with the XT:1900i immersion model scanner for qualification. The XLR uses a new laser architecture that replaces the conventional power amplifier stage with a recirculating ring; it uses an optical evolution based on the XL platform, which has been widely used for volume production ArF lithography.

The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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