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SENSOR SYSTEMS

Photonics Spectra
Oct 2007
PI_Physik-Instrumente.gifA 13-page brochure titled “Capacitive Displacement Sensors — Nanometrology Solutions” is available from PI (Physik Instrumente) LP in pdf or in print. The publication details the company’s offerings, including the D-510 series PISeca single-electrode capacitive sensors for subnanometer-precision measurements, the E-852 PISeca signal conditioner electronics for single-electrode capacitive sensors and the E-509.E3 three-channel sensor module with additional servo controllers for piezo positioning systems. Capacitive two-plate position sensors also are detailed. An applications overview, tutorial and glossary are provided.



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