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Lucent Picks ArF Scanner from Nikon Precision

Photonics.com
Mar 1999
BELMONT, Calif., March 12 -- Nikon Precision Inc. reports that Lucent Technologies has chosen its ArF scanner for work on advanced communications semiconductors at Lucent's Bell Laboratories development facility at Cirent Semiconductor in Orlando, Fla. Nikon's high NA (0.60) scanning system met the small feature sizes of 150 nm and below planned for Lucent's new pilot line.
Nikon Precision is the North American subsidiary of Nikon Corp.; Cirent Semiconductor is a manufacturing joint venture of Lucent Technologies' Microelectronics Group and Cirrus Logic, Inc.


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