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Toshiba Develops 32nm CMOS Platform Tech

Photonics.com
Dec 2008
Toshiba Corp. of Tokyo has announced a cost-effective 32-nm CMOS platform technology that offers higher density and improved performance while halving the cost per function from 45-nm processes. The platform was created by applying single-exposure lithography and gate-first metal gate/high-K process technology. It enables a 0.124 µm2 SRAM cell and a gate density of 3650 gate/mm2. The platform is based on a 32-nm process developed jointly with NEC Electronics Corp. The strict design rule in the 32-nm generation was originally seen as requiring dual exposure technology in the lithography process, which would result in higher process costs due to increased steps, and in degraded manufacturing yields owing to increased process dusts. Toshiba realized an architecture based on single-exposure lithography by applying ArF immersion lithography with a NA 1.3 and over, and by optimizing the lithography illumination conditions. The development work also demonstrated that application of a metal gate/high-K not only boosts transistor performance but also reduces threshold voltage mismatch. In addition, a bent-shaped type cell was selected for layout optimization, which also contributed to reduce threshold voltage mismatch. By adopting this approach, Toshiba said it realized a 32-nm CMOS platform design that reduces cost per function by 50 percent over 45 nm.


GLOSSARY
cell
1. A single unit in a device for changing radiant energy to electrical energy or for controlling current flow in a circuit. 2. A single unit in a device whose resistance varies with radiant energy. 3. A single unit of a battery, primary or secondary, for converting chemical energy into electrical energy. 4. A simple unit of storage in a computer. 5. A limited region of space. 6. Part of a lens barrel holding one or more lenses.
illumination
The general term for the application of light to a subject. It should not be used in place of the specific quantity illuminance.
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
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