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Lambda Physik Gets Record Orders from Silicon Valley Group

Photonics.com
Oct 2000
FT. LAUDERDALE, Florida, Oct. 19 -- Lambda Physik has received follow-on orders for its NovaLine A4020 and NovaLine K2020 lasers from Silicon Valley Group Inc. totaling $16.9 million, the company's biggest ever.
Silicon Valley Group ordered the NovaLine A4020, which is an argon-fluoride, 193 nm laser with a 4 kHz repetition rate and an output power of 40 watts, specifically because of the catadioptric design of its Micrascan V high NA, high-throughput scanner. The A4020's partially narrowed beam and 4 kHz repetition rate, along with its energy dose stability, allows customers to take full advantage of scanner improvements and maximize wafer throughput and yield, said Lambda Physik. The NovaLine K2020 is a krypton-fluoride, 248 nm excimer laser designed specifically for the catadioptric imaging systems used in Silicon Valley Group's 248 nm high-throughput scanners. The laser operates with a repetition rate of 2 kHz.
The order confirms the high potential of our technology for the next generations of excimer lasers for microlithography and our ability to meet our customers' requirements , said Dr. Dirk Basting, CEO and founder of Lambda Physik. We have reached an important milestone on our way to continuously expanding our market position in microlithography.


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