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Photonics Dictionary

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vacuum chamber
A vacuum chamber is a sealed enclosure from which air and other gases are removed to create a low-pressure environment, typically close to or at a complete vacuum. These chambers are often...
backstreaming
The term used in reference to vacuum systems using oil and diffusion pumps, describes the migration of pump fluids and their decomposition products into the vacuum chamber.
cold atom
Cold atoms refer to atoms that have been cooled to extremely low temperatures, typically in the microkelvin (µK) to nanokelvin (nK) range, close to absolute zero (0 Kelvin or -273.15°C). At...
getter
In vacuum deposition, a device that removes contaminants from the vacuum chamber.
ion-beam sputtering
Ion-beam sputtering (IBS) is a physical vapor deposition (PVD) technique used for depositing thin films onto substrates. It involves bombarding a target material with a beam of energetic ions,...
laser-induced cut and patch
A process used in the design, repair and customization of integrated circuits. A low-power laser etches a silicon wafer placed inside a gas-filled vacuum chamber, initiating a chemical reaction.
residual gas analysis
A measurement in optical thin-film coating processes whereby the gases remaining in the vacuum chamber after coating are characterized by mass spectroscopy.
sputtering equipment
Sputtering equipment is machinery used in the process of physical vapor deposition (PVD), specifically sputtering. Sputtering is a method of depositing thin films of material onto a substrate surface...
sputtering target
A sputtering target is a solid material used in the process of physical vapor deposition (PVD), specifically sputtering. Sputtering targets are typically made of metals, metal alloys, or compounds...
thin-film deposition equipment
Thin-film deposition equipment refers to machinery and tools used in the process of depositing thin layers of material onto a substrate surface. This technique is commonly employed in various...
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