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NANOPOSITIONING

Photonics Spectra
Nov 2001
Mad City Labs Inc.Request Info
 
The Nano-Align is a five-axis nanopositioning system suitable for such applications as substrate/mask alignment, engineering, biotechnology and microscopy. Mad City Labs Inc. says the system was designed with a low profile and a generous center aperture for easy integration into existing instrumentation, such as microscopes or probe assemblies. Operating under closed-loop control, the three axes provide a range of motion of 100 x 100 x 50 µm with subnanometer accuracy and <5 nm of out-of-plane motion, and tip/tilt motion of 1.2 mrad with submicroradian resolution.


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