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MEASUREMENT PROBE

Photonics Spectra
Sep 1997
Star Tech Instruments Inc.Request Info
 
Star Tech Instruments Inc. has developed the HT-500C probe for measuring the uniformity of high-power lamps at the wafer plane. This instrument was designed to operate at temperatures up to 500 °C without loss of accuracy. Other features include 5% long-term stability, 5% error over the design temperature range, linearity over approximately five orders of magnitude and cosine angle dependence of over ±70°. Larger probes are available for lamps up to 300 mm in diameter.


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