Jan 2002Mad City Labs Inc.Request Info
The Nano-MTA2 piezoactuated tip/ tilt stage from Mad City Labs Inc. is suitable for such applications as mask alignment and laser beam steering. This two-axis stage has a total range of motion of 2.0 mrad per axis and submicroradian resolution under closed-loop control. The device, which can be mounted in any orientation, is available with a rectangular or cylindrical footprint and in aluminum or invar. It has fully integrated position sensors and can be modified for vacuum compatibility or to meet user requirements.