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WAFER PROCESSING

Photonics Spectra
Feb 2003
EV Group (EVG)Request Info
 
EV Group offers the EVG 120 resist coating and development system for MEMS, advanced packaging, compound semiconductors, power devices and nanotechnology. The system can integrate up to two spin modules and has a robot handling system that provides a throughput of 120 wafers per hour. It allows quick changeover to various wafer sizes and can be tooled for diameters of 50 to 300 mm. Positive and negative resists, polyimides, thin-resist layers and high-viscosity resists can be processed. The bake, chill and vapor modules can be reconfigured for specific applications.


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GLOSSARY
nanotechnology
The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
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