DPSS LASER SYSTEM
Jun 2003IPG Photonics, Microsystems Div.Request Info
A solid-state laser system for materials processing has been released by JPSA Laser. The IX-300-DPSS incorporates UV diode-pumped solid-state lasers and beam delivery components. It is suitable for MEMS, bioMEMS, microfluidics, lab-on-chip, chip packaging, and microdrilling and -cutting applications down to 5-µm spot sizes. Available at 355 and 266 nm, the air-cooled system features granite optomechanical stabilization and custom air-bearing stages for micromachining. It measures 60 x 42 in. and provides a position radius of 2 µm over a 100 x 100-mm area with stage orthogonality of better than 2 arc sec.