Dec 2003Leybold Optics GmbHRequest Info
The SyrusPro 700 coating unveiled by Leybold Optics GmbH is equipped with a control system and proprietary OMS 4000 and advanced plasma source options. The thickness distribution uniformity depends on the substrate drive; that is, it increases from calotte to planetary and single/high-speed drives. Precise layer-growth control using in situ optical and/or physical layer thickness monitoring results in high product yield. The system is suitable for flexible small-batch production and for prototyping and process development in preproduction environments.