Sep 2004Aerotech Ltd.Request Info
WaferMax Z from Aerotech Ltd. is a motorized vertical lift submicron positioning stage based on direct-drive, cog-free linear motor technology. Straightness/flatness accuracy is ±2 µm, and resolution is 0.83 nm. Pitch, roll and yaw are all 20 arc sec, and travel range is 5 mm. The system, measuring <250 × 210 mm including the motor and encoder connectors, achieves maximum speed of 4 mm/s, with error-mapped and -calibrated positioning accuracy of ±1.5 µm and bidirectional repeatability of ±0.5 µm.