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3-D PIEZO STAGE

Photonics Spectra
Sep 2004
piezosystem jena GmbHRequest Info
 
3-D PIEZO STAGE The microTritor 3-D piezo stage launched by piezosystem jena GmbH offers a total range of motion of up to 9 µm in the X-, Y- and Z-axes and a resonant frequency of nearly 2.3 kHz. The compact nanopositioning system measures 15 × 15 × 15 mm, enabling integration into scanning microscopes. Vacuum and cryogen-ic versions also are available. It achieves 0.02-nm open-loop resolution. Applications include fiber alignment, scanning systems, laser tuning and semiconductor inspection.


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