PLµ 2300 OPTICAL IMAGING PROFILER
Jan 2005Sensofar MetrologyRequest Info
Sensofar-Tech SL of Terrassa (Barcelona), Spain, a spinoff company founded in 2001 from the Technical University of Catalonia, has launched an optical imaging profiler that measures from the same head using three techniques: confocal microscopy, and phase-shift and vertical scanning interferometry. The user simply chooses the appropriate objective on the nosepiece, selects the objective and the right technique on the software, and focuses the sample.
The PLµ 2300 was developed using a proprietary arrangement based on high-power LED illumination and microdisplay technology. The confocal arrangement's main advantages are the high light efficiency of the illumination hardware and the high-contrast algorithms. The confocal technique measures steep slopes, samples containing dissimilar materials, and rough and low-reflective surfaces; the phase-shift and the vertical-scanning interferometry techniques are suitable for measuring smooth surfaces, including those with large fields of view.
The compact and robust system contains no moving parts and weighs 4.5 kg. It is modular and suitable for standard laboratory configurations and for OEM integrated applications for production and quality control. The instrument achieves 70° slopes on smooth surfaces, 12:1 aspect ratios, centimeter-scale profiles and 0.1-nm repeatability measurements.
Applications include microelectromechanical systems, optics and micro-optics, semiconductors, integrated circuits and materials testing, biotechnology and thickness measurements.