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WAFER INSPECTION

Photonics Spectra
Oct 2005
KLA-Tencor (See Lam Research Corp.)Request Info
 
Available from KLA-Tencor is the 2800 series bright-field wafer inspection platform, which enables the wide capture of critical defects across all layers. The company says that the technology provides ultrabroadband (deep-UV, UV and visible) wavelength inspection at twice the throughput of earlier bright-field imaging tools. It is designed to help chipmakers meet the defect and yield requirements for developing integrated circuits for the 65- and 45-nm nodes. Suitable for inspecting critical lithography and etch layers, the platform’s time delay and integration sensors and ultrabroadband illumination reduce the damage risk and sensitivity trade-offs associated with laser-based bright-field systems.


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