Nov 2005piezosystem jena GmbHRequest Info
The nanoSX nanopositioning stages have been unveiled by piezosystem jena GmbH. They are 10 mm tall and have a free center hole of 12.5 mm and outside dimensions of 60 × 60 mm. Based on the proprietary bidirectional actuating nanoX design, the ultraflat stages move high load masses with an accuracy of 0.6 nm. They can be equipped with a high-resolution feedback system for closed-loop control and are easily combined for an X-Y scanning system. Cryogenic and vacuum versions also are available.