FREQUENCY-DOUBLED ION LASER
Feb 1997LEXEL LaserRequest Info
The Lexel 95 SHG (second harmonic generation) laser from Lexel Laser Inc. is an intracavity frequency-doubled ion laser system equipped with a nonlinear BBO crystal that produces second harmonic generation in the deep UV. Providing more than 100 mW of hands-off operation at 244 or 257 nm, the system is based on a folded-cavity design. It is suitable for semiconductor wafer inspection, optical fiber grating and other applications requiring deep UV and high power. The BBO crystal contributes durability, low optical loss and phase matching region down to 205 nm. The crystal also has high birefringence and relatively small dispersion, which result in a wide phase matching range.