Aug 2006PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
The P-628.2CD X-Y flexure-guided scanning stages released by Physik Instrumente LP attain a travel range of 1000 μm for high-precision applications in scanning probe microscopy, nanometrology, biotechnology, interferometry, nanopositioning, quality assurance and semiconductor technology. Closed-loop digital control enables up to 99.98% positioning accuracy. The friction-free design is stiff and compact for easy integration, and the piezo drives are ceramic-encapsulated for protection against humidity. A selection of ultralow-noise 32-bit controllers is offered to expedite communications, and extensive software tools are provided.