STAGE, CONTROLLER
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
PI (Physik Instrumente) LP is offering an improved F-206.S six-axis parallel-kinematics nanoalignment system that provides high-resolution 6-D motion, a user-programmable pivot point with a fully virtualized center of rotation and alignment software. It has one common moving platform for all six actuators, resulting in lower inertia and faster response and settling times. The system has backlash-free flexure joints and no moving cables, and it achieves 0.033-μm actuator resolution. The digital controller comes with alignment routines and LabView drivers.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: October 2006
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