NanoVue, a 248-nm 4× deep-UV zoom lens manufactured by Navitar Inc., works with infinity-corrected microscope objectives to enable optical inspection with <0.1-μm resolution and a zoom range of 0.75× to 3×. When using the 100× objective corrected at a 200-mm tube length, the range can be extended to 75× through 300×. Using a 100× infinity-corrected deep-UV objective with a 2/3-in. sensor results in a field of view from 0.14 to 0.37 mm. Applications include deep-UV reticle and photomask inspection, thin-film measurement, wafer inspection, failure analysis and process control.