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Photonics Spectra
Dec 2006
Navitar Inc.Request Info
Navitar_Nanovue.gifNanoVue, a 248-nm 4× deep-UV zoom lens manufactured by Navitar Inc., works with infinity-corrected microscope objectives to enable optical inspection with <0.1-μm resolution and a zoom range of 0.75× to 3×. When using the 100× objective corrected at a 200-mm tube length, the range can be extended to 75× through 300×. Using a 100× infinity-corrected deep-UV objective with a 2/3-in. sensor results in a field of view from 0.14 to 0.37 mm. Applications include deep-UV reticle and photomask inspection, thin-film measurement, wafer inspection, failure analysis and process control.


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An instrument consisting essentially of a tube 160 mm long, with an objective lens at the distant end and an eyepiece at the near end. The objective forms a real aerial image of the object in the focal plane of the eyepiece where it is observed by the eye. The overall magnifying power is equal to the linear magnification of the objective multiplied by the magnifying power of the eyepiece. The eyepiece can be replaced by a film to photograph the primary image, or a positive or negative relay...
zoom lens
An optical system of variable focal length, the focal plane remaining in a fixed position. This result is achieved by moving some of the components of the system along the lens axis, other components remaining stationary.  
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