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EXCIMER LASER

Photonics Spectra
Apr 2007
Gigaphoton Inc.Request Info
 
Gigaphoton Inc. has expanded its GT series of argon-fluoride light sources with the GT61A excimer laser. The device has an emission wavelength of 193 nm, a repetition rate of 6000 Hz and pulse energy of 10 mJ. It is designed for lithography tools with numerical apertures of 1.3 and higher. The company says that the laser provides a 30% improvement in spectral bandwidth compared with its predecessors.


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GLOSSARY
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
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