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P-733.3CD XYZ Nanopositioning System

Photonics.com
Aug 2007
PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
 
PI — a maker of nanopositioning and piezo-based precision motion-control equipment for semiconductor, nanotechnology and photonics applications — offers the new P-733.3CD, XYZ nanopositioning and scanning system.

Typical applications include: Surface profiling, metrology/interferometry, scanning microscopy, image processing/stabilization, semiconductor testing and alignment nanomanipulation.

Features:
  • Parallel Metrology with Capacitive Sensors for up to 0.1 nm Resolution
  • Parallel Kinematics for Better Multiaxis Accuracy and Dynamics
  • Frictionless Lightweight Flexure Design for Sub-Millisecond Response
  • Long-Life Piezo Actuators, 100 x 100 x 10 µm Travel Range
These high-resolution piezo stages are designed for materials research, high-resolution microscopy, ultraprecise alignment and imaging applications. The parallel-kinematics design (only one common moving platform for XYZ) reduces the moved mass, and enables -- together with the stiff design --higher operating speeds than other piezo scanning stages. A parallel metrology position sensor design provides highly accurate position information in all axes.


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GLOSSARY
actuator
Mechanical device intended for the translation (rotational and linear) using high precision control from electronically operated circuits. See linear actuator; rotary actuator.
metrology
The science of measurement, particularly of lengths and angles.
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
scanning
The successive analysis or synthesizing of the light values or other similar characteristics of the components of a picture area, following a given method.
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