Oct 2007Thermo Fisher Scientific, Molecular SpectroscopyRequest Info
Thermo Fisher Scientific Inc. has announced the ECO 3500 Fourier transform infrared metrology system, which integrates easily into automated wafer handling facilities. It incorporates a spectrometer, enhanced analytical software and a software interface that provides full SEMI E95-compliant access for process engineering, research and production-monitoring applications. Two in-line load ports and a high-precision edge grip stage improve wafer handling capabilities, accuracy and repeatability. The system uses an air-cooled infrared source and a beamsplitter mounted in a purged housing. It performs ppm-level measurement of carbon and oxygen in silicon, weight percent level measurement of dielectric films, and compositional analysis of hydrogen in silicon nitride and oxygen nitride films.