The IntelliDrill 30 series intelligent laser drilling heads for drilling circuit boards, for perforating foils and for texturing surfaces have been unveiled by Scanlab AG. The scan modules for CO2 lasers are equipped with beryllium deflection mirrors and with two digital servo control boards and a digital interface board. They have a 30-mm aperture and achieve beam displacement of 37.12 mm. Small vector response at a 1-mm pitch is 0.8 ms and at 10-mm pitch, 2.3 ms. Repeatability is <22 μrad, long-term drift over 8 h is <0.6 mrad after warm-up, typical scan angle is ±0.26 rad, gain error and zero offset are both <5 mrad, and nonlinearity is <3.5 mrad. Operating temperature is 25 ±10 °C.