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Avia UV Laser

Photonics.com
Apr 2008
Coherent Inc.Request Info
 
For High-Speed IC Die Singulation
SANTA CLARA, Calif., April 1, 2008 -- Coherent Inc. said its new Avia 355-23-250 offers the highest pulse-repetition rate of any Q-switched ultraviolet laser, making it the optimum solution for high-speed integrated circuit (IC) die singulation with high yields.

The new laser can deliver over 8 W of 355-nm output at repetition rates of 250 kHz and higher, Coherent said. The combination of high average power and high pulse repetition rate translates directly into high process throughput with minimal silicon microcracking.

Avia.jpgCoherent said the output flexibility of the Avia 355-23-250 is also unique, making it the only laser that can provide output tailored for both scribing and dicing. PulseEQ allows the laser to deliver low pulse energy at a 250-kHz repetition rate, which is ideal for gently scribing through the thin (typically 10 µm) epitaxial circuitry layers. Yet the same laser can also be operated at lower repetition rates, with pulse energies as high as 80 J for dicing (cutting) through the wafer itself.

Because of fully automated active-optimization functions such as PulseEQ, ThermEQ and PosiLock, the pulse-repetition rate and pulse energy can be rapidly changed with no effect on the laser's beam quality (M2 less than 1.3), high pulse to pulse energy stability (noise less than 5 percent rms at 70 kHz), and beam pointing, the company said.

The Avia 355-23-250 is the ideal tool for high-throughput micromachining applications, such as scribing low-k semiconductors, dicing thin memory chips, and via hole drilling in printed circuit boards. Other applications include solar cell micromachining and direct patterning of thin films, Coherent said.

For more information, visit: www.coherent.com; e-mail: tech.sales@coherent.com

Coherent Inc.
5100 Patrick Henry Dr.
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800



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GLOSSARY
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
scribing
The process of perforating a silicon or ceramic substrate with a series of tiny holes along which it will break. Nd:YAG or CO2 lasers are now routinely used.
solar cell
A device for converting sunlight into electrical energy, consisting of a sandwich of P-type and N-type semiconducting wafers. A photon with sufficient energy striking the cell can dislodge an electron from an atom near the interface of the two crystal types. Electrons released in this way, collected at an electrode, can constitute an electrical current.
thin film
A thin layer of a substance deposited on an insulating base in a vacuum by a microelectronic process. Thin films are most commonly used for antireflection, achromatic beamsplitters, color filters, narrow passband filters, semitransparent mirrors, heat control filters, high reflectivity mirrors, polarizers and reflection filters.
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