Four telecentric UV scanning lenses that accommodate input beam diameters of up to 17 mm and wavelengths of 266 or 355 nm have been introduced by Special Optics. Focal lengths include 34 and 50 and two at 100 mm, with scan fields of 9, 20, 45 and 55 mm, respectively. The diffraction-limited lenses have a deviation from telecentricity of <0.9° for single-axis scanning and <3° for dual. Spot sizes are 1.4, 3.5 and 7.1 μm. Applications include cutting of solar cells, and laser marking, drilling and scribing.