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URB100CC Rotation Stage

Photonics Spectra
Jun 2010
Newport CorporationRequest Info
 
Newport Corp. has introduced the URB100CC high-speed rotation stage for motion applications that require fast moves over larger angles or continuous rotation at high duty cycles. It delivers high-precision performance relative to wobble, angular repeatability and speed stability. Typical applications are lidar, 3-D imaging and film thickness measurements of semiconductor wafers. Instead of a worm gear, it features a belt drive, which provides rotation speeds of up to 720°/s, without sacrificing lifetime. It also includes a proprietary four-point large-diameter contact ball bearing. This two-piece design provides good rigidity and high reliability, while minimizing wobble (50 μrad) and eccentricity (3 μm). For added convenience, position feedback is provided by a motor-mounted 2000-point rotary encoder that produces 0.01° resolution.


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GLOSSARY
eccentricity
In the tolerancing of optical elements, the displacement of the optical axis from the mechanical axis.
lidar
An acronym of light detection and ranging, describing systems that use a light beam in place of conventional microwave beams for atmospheric monitoring, tracking and detection functions. Ladar, an acronym of laser detection and ranging, uses laser light for detection of speed, altitude, direction and range; it is often called laser radar.
resolution
1. In optics, the ability of a lens system to reproduce the points, lines and surfaces in an object as separate entities in the image. 2. The minimum adjustment increment effectively achievable by a positioning mechanism. 3. In image processing, the accuracy with which brightness, spatial parameters and frame rate are divided into discrete levels.
wafer
A cross-sectional slice cut from an ingot of either single-crystal, fused, polycrystalline or amorphous material that has refined surfaces either lapped or polished. Wafers are used either as substrates for electronic device manufacturing or as optics. Typically, they are made of silicon, quartz, gallium arsenide or indium phosphide.
wobble
In micropositioning systems, motion (most frequently undesired) about the Z-axis.
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