The E-761 piezoelectric controller from PI (Physik Instrumente) LP features PCI-bus connectivity that enables high-resolution vision, precise synchronization between components, and high-speed motion control and data acquisition. Suitable for such demanding applications as scanning microscopy, imaging and metrology, the device provides control over three logical axes of closed-loop piezoelectric nanopositioning systems with capacitive position feedback. It features four onboard piezo drivers, active trajectory control, a 32-bit digital signal processor and 24-bit digital-to-analog converters. Sensor and actuator axes need not be parallel to each other, and rotation can be added to a single-module X-Y motion system. Tilt errors can be reduced to provide motion accuracies in the subnanometer range.