MEMS Scanning Micromirrors
Feb 2011Lemoptix SA (acquired by Intel Corp.)Request Info
LAUSANNE, Switzerland, Feb. 23, 2011 — Lemoptix SA’s silicon-based, magnetically actuated microelectromechanical systems (MEMS) micromirror technologies are replacement solutions for traditional galvanometer and rotating mirrors.
Responding to industry requests to reduce size and power consumption and to increase performance of micromirror devices, the company has developed a bottom-up approach by using semiconductorlike equipment to build micromirrors with actuation based on magnetic and heat-dissipating principles instead of gearings. The laser scanning micromirrors can be used in optical applications such as 3-D measurement, bar-code scanners, endoscopy, confocal microscopy, optical spectrometers, medical imaging, scanners, printers, head-up displays and projectors.
Features include a large optical scanning angle above 40° in static (step by step, DC) mirrors; a large optical scanning angle above 70° in resonant mirrors; a patented and integrated mirror position sensor; ultraprecise MEMS driving and sensing electronics; voltage below 5 V; power consumption down to microwatts; a reflective surface measuring >2.5 × 2.5 mm; high shock resistance; no hysteresis; and insensitivity to electrostatic discharge and radiation
Made of single-crystal silicon, the micromirrors demonstrate robustness and long-term stability. The surface reflectivity is enhanced by a thin coating of metal material. The flexible fabrication process means that a variety of materials can be coated, catering to light sources of different wavelengths.
The laser scanning micromirrors are integrated by OEM customers into a number of applications like optical spectrometers, laser range finders and microscopes, enhancing performance and enabling development of smaller, higher resolution and lower cost products. The resonant and static scanning micromirrors are designed to rotate and deflect light.
MEMS mirror actuation does not use gearing effects or any other mechanical contact-based effects. It uses a fatigue-free magnetic actuation whereby an electric current flowing on the mirror itself, under a magnetic field, induces mechanical displacement.