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Optical Profiler

Photonics Spectra
Mar 2011
Sensofar MetrologyRequest Info
 
Providing noncontact metrology for commercial and high-end optical surfaces, the PLu apex from Sensofar-Tech S.L. is a compact 2-D profiling system designed to measure any optical surface, including aspheric and free-form optics. Based on the company’s core confocal profilometry technology, it uses a proprietary tracking algorithm, a high-numerical-aperture microscope objective and structured illumination to determine the position of the sample surface. The system reconstructs the surface profile by tracking horizontal movement of the objective using a high-resolution air-bearing stage, then collates this data with the vertical position of the sensor head that keeps the surface in focus. Horizontal resolution is 1 nm, and vertical resolution is 0.5 nm.


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GLOSSARY
microscope objective
The lens located at the object end of a microscope tube. A wide range of objectives is available, including simple achromats, the color-corrected apochromats and the flat-field objectives. Objectives are specified by numerical aperture and magnification (at the standard 160-mm tube length).
optical profiler
Also known as a white-light interferometer. Measures surface texture and shape from nanometer-scale roughness to millimeter-scale step heights. A standard arrangement includes an illumination source, traditionally a tungsten-halogen bulb, coupled to an optical system with a variety of interferometric objectives.
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