Two-Axis Linear Stage
Jul 2011Aerotech Inc.Request Info
Aerotech’s ANT130-XY crossed-roller-bearing, direct-drive, dual-axis linear stage offers 60 x 60-, 110 x 110- and 160 x 160-mm travel. Direct drive has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. ANT130-XY has 1-nm resolution, ±75-nm repeatability, ±250-nm accuracy and <1-nm in-position stability. The sleek design provides an extremely low profile of only 85 mm.