Jul 2011PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) L.P. has released a miniature hexapod.
The six-axis precision parallel positioner is available in standard and vacuum-compatible
versions. The M-811 measures 130 mm in diameter and 115 mm in height and can handle
loads to 5 kg and position them in all six degrees of freedom with submicrometer
precision. It offers actuator resolution of 0.04 μm, repeatability of ±0.5
μm and velocity to 10 mm/s. The vacuum hexapod is bundled with software and
a digital controller with high-speed Ethernet connectivity. The hexapod is easy
to program and command because all positions are given in Cartesian coordinates.
Applications include medical engineering, x-ray microscopy and photonics alignment.