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  • FMS Precision Linear Stages
Jul 2011
Newport CorporationRequest Info
IRVINE, Calif., July 22, 2011 — Newport Corp. has launched the FMS series precision linear motion control stages. They are designed for use in surface profiling, tribology, and contact (stylus) and noncontact metrology (white-light interferometry).

The stainless steel stages permit high straightness and flatness, good thermal stability, and good bidirectional and unidirectional repeatability. Reliable and robust, the anti-creep crossed roller bearings enable smooth motion with minimal noise.

Suitable for use in surface metrology applications, the linear stages are available in 100-, 200- and 300-mm travel options and can be ordered with either a DC or a stepper motor. They are fully compatible with the company’s line of ESP integrated controller/driver products, including the single-axis SMC100, the three-axis ESP301 and the eight-axis XPS universal controller.

The small footprint and all-steel construction (including the base, carriage, ballscrew and bearings) ensure an accurate and stable platform with good flatness and straightness at speeds of up to 100 mm/s, suitable for surface profiling and microstructure characterization. Other applications include scribing, micromachining and delay lines.


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The process of perforating a silicon or ceramic substrate with a series of tiny holes along which it will break. Nd:YAG or CO2 lasers are now routinely used.
stepper motor
A positioning drive that rotates a fraction of a 360° turn when the motor coils are activated, resulting in linear or rotary motion. They are generally one of two types, either variable reluctance or permanent magnet; the characteristics are much the same. Also called stepping motors.
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