A 200-kV transmission electron microscope (TEM) manufactured by JEOL USA Inc. performs high-throughput nanoanalysis for process and quality control of mass-produced semiconductor and materials samples. The multifunction JEM-2800 features high-resolution imaging in TEM, scanning TEM and scanning electron modes; ultrasensitive elemental mapping with a large-angle energy-dispersive spectrometer; electron energy loss spectroscopy for chemical analysis; critical dimension analysis; tomography; and in situ observation of samples. The microscope functions without the use of the traditional fluorescent screen on the electron column. It speeds specimen observation through automatic functions including adjustment of focus, astigmatism, contrast, brightness, height and crystal zone axis alignment. Switching between analysis modes is seamless, and quick data collection shortens turnaround time between samples.