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  • Electrostatic Actuator IC
Mar 2012
Teledyne DALSA, Machine Vision OEM ComponentsRequest Info
WATERLOO, Ontario, Canada, March 2, 2012 — For high-density microelectromechanical systems (MEMS)/micro-optoelectromechanical systems (MOEMS), Teledyne Dalsa Semiconductor has announced the availability of its DH9685AB electrostatic actuator high-voltage integrated circuit (IC).

Using proprietary high-voltage CMOS/DMOS technology, the DH9685AB is designed for next-generation, high-density, small-footprint systems using MEMS or MOEMS activation with electrostatic forces.

It offers low power consumption where a large number of channels is critical. With advanced ball-grid-array packaging, it achieves integration with the smallest footprint area per channel. It has 96 high-precision, high-voltage channels up to 240 V in a 17 × 17-mm package and is RoHS-compliant. It operates through a digital three-wire interface.

Features include a 16-bit digital-to-analog converter with sample and hold; power consumption <500 mW; 24 selectable quads of four high-voltage channels programmable with four low-voltage 16-bit digital-to-analog converters; an adjustable output range; single-polarity low-voltage power supplies; stable high-voltage output over time; and an internal diode for temperature monitoring.


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