PIEZOELECTRICALLY DRIVEN NANOPOSITIONERS
Jan 2000PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
Physik Instrumente GmbH & Co. has introduced a piezoelectrically driven nanopositioning system for microscope turrets. The Powfoc turret-scanner provides subnanometer resolution, scanning ranges of 100 and 150 µm, and sufficient force for scanning the complete turret with several objectives. The positioner travels straight within 2 arc sec and has a settling time between 10 and 20 ms. The Powfoc's multilayer piezoelectric drive pushes a flexure parallelogram by an integrated lever mechanism. Position sensors provide feedback for closed-loop control. Applications for the device include life-science and confocal microscopy, scanning interferometry and surface structure analysis.