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Chiller/Heater Technology

Photonics.com
Oct 2013
Durex IndustriesRequest Info
 
CARY, Ill., Oct. 7, 2013 — Durex Industries has announced its patent-pending extreme ceramic chiller/heater for semiconductor equipment and analytical instrumentation applications.

The aluminum nitride chiller-technology-based ceramic heater has an embedded tungsten resistance temperature detector (RTD). It can heat from 100 to 450 °C at 200 °C/s and can cool from 450 to 100 °C at 100 °C/s.

Its performance is based on proprietary multilayer monolithic ceramic technology. The high thermal conductivity and low temperature expansion properties of aluminum nitride enable the fast temperature response.

For more information, visit: www.durexindustries.com


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