Air-Bearing Rotary Stages
Nov 2013Aerotech Inc.Request Info
Aerotech ABRS series direct-drive, rotary air-bearing stages provide superior angular positioning, velocity stability and error motion performance in a low-profile package. They are designed to meet the requirements of wafer inspection, precision metrology, x-ray diffraction systems, optical inspection/fabrication and MEMS/nanotechnology fabrication. A clear aperture can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements.