Released by Opto Diode Corp., the ODD-SXUV-DLPSD duolateral UV/EUV (extreme UV) submicron position resolution sensor is suited for advanced lithography applications. The device provides a stable response after exposure to UV and/or EUV radiation. Featuring a 5 × 5-mm active area, the position-sensing photodiode operates at 1- to 400-nm wavelengths. Responsivity at 13 nm is typically 0.2 A/W; at 354 nm, responsivity is typically 0.02 A/W. Dark current under operating conditions is 10 nA, typical, and 50 nA, maximum. The device offers reverse breakdown voltage of a minimum of 50 V and a capacitance of 40 (typical) to 60 (maximum) pF.