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DEEP-UV MIRRORS

Photonics Spectra
Mar 2000
CVI Melles GriotRequest Info
 
Deep-UV aluminum (Duval) mirrors provide 90% to 92% reflectivity at 193 nm and are more durable than standard UV-protected Al mirrors, according to their manufacturer, CVI Laser Corp. Available on UV-grade fused silica, CaF2 or MgF2 substrates, the mirrors have a surface figure of λ/10 at 633 nm after coating. The broadband Duval mirrors are suitable for thin-film ellipsometry, semiconductor metrology and UV, VIS and NIR spectroscopy. The devices are available in round, rectangular and square shapes, either off the shelf or in production quantities.


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