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Laser Monitoring Software

Photonics.com
Jul 2015
Gigaphoton Inc.Request Info
 
OYAMA, Japan, July 13, 2015 — Gigaphoton Inc. has announced new Web-based monitoring software for excimer lasers used in semiconductor manufacturing.

REDeeM Cloud is designed to help users collaboratively analyze performance data and minimize downtime.

In the future, the application will allow users to develop their own unique features, extensions and user interfaces.


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GLOSSARY
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
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