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Air Bearing Stages

Photonics.com
Sep 2015
PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
 
AUBURN, Mass., Sept. 4, 2015 — A-311 PIglide ISPI (Physik Instrumente) LP has announced the A-311 PIglide IS series of compact, planar air bearing stages, designed to deliver precise, vibration-free motion.

Fully preloaded air bearings in the stages provide frictionless motion, resulting in negligible hysteresis or reversal error with zero wear of mechanical components. The bearings' surface averaging effects provide 0.1-μm/in. straightness and flatness with roll/pitch/yaw errors of 1 to 2 arcsec.

Position information down to 1-nm resolution comes from integrated linear encoders. Linear motors reach velocities up to 1 m/s and acceleration to 1 g, a prerequisite for scanning and automation applications.

A compact, single-base-plate design provides a low profile, enabling integration into tight spaces. The stages are suitable for wafer inspection, laser marking, optical metrology and other precision-motion applications.


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