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SPUTTERING SOURCE

Photonics Spectra
Mar 2001
Kurt J. Lesker Co.Request Info
 
laSputtering The Kurt J. Lesker Co. has announced the Torus 7 high-rate magnetron sputtering source designed for high-volume coating applications. It has target utilization of 40% to 60% and operating power of up to 20 kW DC for certain applications. The source accepts 7-in.-diameter targets from 0.5 to 0.75 in. thick. Features include quick-release target clamps, stainless steel cooling wells and magnets that are isolated from the cooling water. The targets may be cooled directly or indirectly and are available in two mounting styles.


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