Search
Menu
PI Physik Instrumente - Fast Steering Mirrors LW 16-30 MR

Sensing Platform

Advanced Energy Industries Inc.Request Info
 
Facebook X LinkedIn Email
DENVER, July 12, 2023 — The Luxtron® M-1100 integrated converter platform from Advanced Energy Industries Inc. offers high-accuracy sensing across a wide temperature range.

The system is designed for plasma-enhanced semiconductor deposition and etch fabrication processes and can operate from -200° to 450 °C with an accuracy of +/- 0.1 °C and stability of +/- 0.05 °C. It features five channels for monitoring multiple probes, and its flexible communication outputs enable digital monitoring, updates, and system integration. The converter utilizes fiber optic probes with phosphor sensor technology and supports both analog and EtherCAT communication interfaces. It can be wall-mounted for easy implementation.


Published: July 2023
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:


When you click "Send Request", we will record and send your personal contact information to Advanced Energy Industries Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

ProductsLuxtronM-1100integrated converter platformsensing platformAdvanced EnergySensors & DetectorssemiconductorsplasmaCommunicationsAmericas

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.